| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe tip cleaning member which can automatically clean a probe, without varying the shape of the tip part of the probe. SOLUTION: The cleaning member A is provided with a plurality of polishing sheets 10 for removing a foreign body from the tip part of the probe 100, a plurality of pedestals 20 for supporting the polishing sheets 10, and a substrate 30 to which the pedestals 20 are provided on the surface so as to stand at the same pitch spacing as the probe 100, in which an elastic deformable body is used for the pedestal 20 so that at least a part of the polishing sheets 10 is inclined by the pressing pressure acting from the tip surface of the probe 100 through the polishing sheets 10 when the cleaning is performed. COPYRIGHT: (C)2005,JPO&NCIPI
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