SPUTTERING TARGET

摘要

PROBLEM TO BE SOLVED: To provide a sputtering target by which the defects of a thin film caused by nodules can be reduced. SOLUTION: In the sputtering target having an erosion region which is eroded and a non-erosion region which is not eroded on sputtering, the surface roughness (Ra) of the upper face in the non-erosion region is≥2.0μm. COPYRIGHT: (C)2005,JPO&NCIPI