| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and equipment for delivering an article being bonded in which even a very small article can be handled exactly as specified with high accuracy and the article on a tray can be taken out and delivered to the tool side without touching the bonding surface of the article subjected to cleaning and surface activation. SOLUTION: An article being bonded is set on a tray while directing the bonding surface upward, a first article on the tray is recognized by a recognizing means while recognizing the position of a first delivery tool for delivering at least the first article while inverting, and after the relative positions of the first delivery tool and the first article are aligned, the first article is taken out by the first delivery tool without touching the bonding surface and delivered to the first tool. COPYRIGHT: (C)2005,JPO&NCIPI
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