| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film beam which is free from an inconvenience such as breakage at the time of producing or driving the same, to thereby improve the reliability of the beam. SOLUTION: The thin-film beam 15 is produced by laminating a sacrificial layer formed of a patterned aluminum deposition on a glass substrate 13, and a thin-film layer astride the sacrificial layer in this order, and removing the sacrificial layer, to thereby obtain the thin-film beam 15 having fixed portions 15a fixed to the glass substrate 13, a pair of support portions 15b erected from the fixed portions 15a, and a movable portion 15c having both edges thereof supported by the support portions 15b so as to be spaced a predetermined gap away from the glass substrate 13. Herein a straight line L connecting between a connection point A between the fixed portion 15a and the support portion 15b, and a connection point B between the movable portion 15c and the support portion 15b, forms an angleαwith a surface of the glass substrate 13, and the angleαis set at 60°or less. COPYRIGHT: (C)2005,JPO&NCIPI
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