| 摘要 |
<p>A space-saving test structure includes a core metal line (112), at least one extrusion detection line (110, 114) and an extrusion monitoring segment (130). The core metal line (112) has a "non-linear configuration" and is capable of conducting current for an electromigration test, an isothermal test, and extrusion monitoring. The at least one extrusion detection line (110, 114) is situated adjacent to the core metal line (112). The extrusion monitoring segment (130) is electrically connected to the at least one extrusion detection line (110, 114). The extrusion monitoring segment (130) is adapted to determine whether an extrusion occurs in the core metal line (112) by measuring a resistance between the core metal line (112) and the at least one extrusion detection line (110, 114).</p> |
