| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To easily generate a light beam having variable intensity distribution by using a mirror device. <P>SOLUTION: A light beam from a light source 31 is introduced into a first DMD (digital mirror device) 32 in the head part 3 of an irradiation apparatus 1 to generate a first reflected light beam propagating in a first direction and a second reflected light beam propagating in a second direction. The first reflected light beam and the second reflected light beam are guided by an optical system 36 to a second DMD 33 and reflected to a predetermined direction to generate an output light beam to irradiate a substrate 9. In the irradiation apparatus 1, a plurality of first mirrors of the first DMD 32 and a plurality of second mirrors of the second DMD 33 are one-to-one matched, and an optical filter 364 is disposed in the optical path of the second reflected light beam in the optical system 36. Thus, a light beam with variable intensity distribution can be easily generated in the head 3. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
