| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus wherein both degradation of a hole diameter precision and steep rise of running cost are prevented, and also to provide a nozzle applicable to the apparatus. <P>SOLUTION: A laser beam source emits a laser beam. A stage holds an object to be machined. A propagation optical system makes a laser beam emitted from the laser beam source incident onto a surface to be machined of the object held by the stage. A nozzle jets gas toward a space between the surface to be machined of the object held by the stage and the propagation optical system. The nozzle is provided with: a housing in which a cavity elongated in a first direction parallel to the surface to be machined of the object held by the stage; a jetting port having a shape elongated in the first direction and to jet the gas in the cavity to the outside; and an introduction port to introduce the gas into the cavity, which opens at a part other than the both ends of the cavity, and is arranged such that the gas having flowed in collides with the inside surface of the cavity before the gas is jetted to the outside. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
