发明名称 Projecting exposure apparatus
摘要 A spatial light modulator has pixel sections for performing spatial light modulation of light. An image-side telecentric image forming optical system forms an image of a two-dimensional pattern of the light having been obtained from the spatial light modulation. A microlens array having microlenses arrayed in two-dimensional directions is located in the vicinity of a plane of image formation of the two-dimensional pattern, whose image is formed by the image forming optical system. A magnification adjusting optical system for adjusting a magnification of image formation at the time of the formation of the image of the two-dimensional pattern of the light with the image forming optical system is located between the image forming optical system and the microlens array.
申请公布号 US2004223229(A1) 申请公布日期 2004.11.11
申请号 US20040838224 申请日期 2004.05.05
申请人 ISHIKAWA HIROMI 发明人 ISHIKAWA HIROMI
分类号 G02B13/24;B41J2/45;G02B26/08;G03F7/20;H01L21/027;(IPC1-7):B41J2/47;G02B13/22 主分类号 G02B13/24
代理机构 代理人
主权项
地址