发明名称 STUD BUMP BONDER
摘要 <P>PROBLEM TO BE SOLVED: To provide a stud bump bonder having a function for forming a plurality of stud bumps on the surface of a workpiece and uniforming the height thereof easily without causing short circuit. <P>SOLUTION: The stud bump bonder for forming stud bumps on the surface of a planar workpiece and having a bonding area and a bump cutting area comprises a means for forming stud bumps on the surface of a workpiece arranged in the bonding area and positioned in the bonding area, and a means having a cutter for cutting a plurality of stud bumps formed on the surface of a workpiece arranged in the bump cutting area and positioned in the bump cutting area and uniforming the height thereof. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004319698(A) 申请公布日期 2004.11.11
申请号 JP20030110537 申请日期 2003.04.15
申请人 DISCO ABRASIVE SYST LTD 发明人 ARAI KAZUNAO;MORI TAKASHI;SANDO HIDEYUKI;NAMIOKA SHINICHI
分类号 H01L21/677;H01L21/60;H01L21/68 主分类号 H01L21/677
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