| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a sample holder capable of emitting the thermoelectron and radiation heat from a filament toward a sample table not only from a sample front face side faced to the filament but also from a sample backface side by reflection on a reflecting plate. <P>SOLUTION: This sample holder for heating a sample under a vacuum condition is provided with a heating means for emitting the thermoelectron and the radiation heat toward the sample, and a reflecting means impressed with a negative potential to reflect the thermoelectron and the radiation heat. The thermoelectron and the radiation heat emitted from the heating means are reflected by the reflecting means to heat the sample. Efficient heating is attained, and a peripheral temperature is prevented from being elevated, because the thermoelectron and the radiation heat emitted to a peripheral part other than the sample table are reduced. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
