CAPACITOR HAVING DIELECTRIC LAYER INCLUDING GROUP-17 ELEMENT, AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a capacitor having a voltage coefficient value or a dielectric absorption value smaller than that of conventional technologies, a method for manufacturing the same, and an integrated circuit containing the capacitor. SOLUTION: A dielectric layer is provided between a first conductive plate and a second conductive plate of the capacitor, and the dielectric layer contains a group-17 element. Fluorine is particularly useful. The capacitor exhibits an improved voltage coefficient value or dielectric absorption value. COPYRIGHT: (C)2005,JPO&NCIPI