| 摘要 |
PROBLEM TO BE SOLVED: To provide a peripheral surface detection optical system, a defect detector, and a defect detection method of a translucent disk for efficiently and precisely detecting defects, such as cracks and chippings, of an outer periphery edge section to the translucent disk from adhered foreign objects. SOLUTION: An inspection region at an edge section is irradiated with light beam spots from the inside through the inside of a disk, and the scattered light from the inspection region is received by a first light-receiving system provided near the inspection region outside the disk to detect defects in the disk, thus nearly preventing the scattered light from being generated from foreign objects which adhere to the outside of the disk. COPYRIGHT: (C)2005,JPO&NCIPI
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