| 摘要 |
PROBLEM TO BE SOLVED: To suppress the effects of Moire fringes in automatic inspection on panels for display. SOLUTION: In this inspection method, a panel for display in which a plurality of display pixels are arranged is imaged so as to acquire a plurality of sensor element signals by a sensor in which a plurality of sensor elements are arranged in the arrangement direction of the display pixels. An addition value of one acquired sensor element signal and its one adjacent preceding or following sensor element signal or more or their average value is determined for every one of the plurality of sensor element signals. COPYRIGHT: (C)2005,JPO&NCIPI
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