METHOD FOR THE PRODUCTION OF PERMEABLE MEMBRANES FROM SEMICONDUCTOR MATERIALS USING MACRO- AND MICRO-PORE ETCHING

摘要

The invention relates to a method for the production of permeable membranes, made from semiconductor materials, by means of electrochemical etching of macropores on a plane side of an essentially planar semiconductor, comprising the steps of etching the plane side of the semiconductor opposing the macropores to give micropores, which as a result of the nature thereof do not extend into the macropores and removal of the sacrificial layer through which the micropores pass with exposure of the ends of the macropores.