发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device provided with a plurality of semiconductor circuits, in which power supply potential and ground potential can be reinforced, regardless of the cross-sectional structure of the semiconductor device. SOLUTION: A plurality of power supply potential regions 13a and ground potential regions 13b which are alternately provided with interlayer insulating layers 13c interposed in plan view are provided on a potential wiring layer 13. A contact plug 15a penetrating a second insulating layer 14 is provided to electrically connecting one source/drain (S/D) region 16a of a selected field effect transistor to a selected power supply potential region 13a, and a contact plug 15b penetrating the second insulating layer 14 is provided to electrically connect the other source/drain (S/D) region 16b of the selected field effect transistor to a selected ground potential region 13b. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004319627(A) 申请公布日期 2004.11.11
申请号 JP20030109116 申请日期 2003.04.14
申请人 RENESAS TECHNOLOGY CORP 发明人 HIROSE MASAKAZU;MORISHITA GEN
分类号 H01L21/3205;H01L21/82;H01L21/822;H01L21/8234;H01L21/84;H01L23/52;H01L27/01;H01L27/04;H01L27/08;H01L27/088;H01L27/12;H01L29/786;H01L31/0392;(IPC1-7):H01L27/12;H01L21/320;H01L21/823 主分类号 H01L21/3205
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