| 摘要 |
PROBLEM TO BE SOLVED: To provide a suction pad which leaves no sucked mark on a workpiece and causes neither flexure nor distortion, when sucking a plate-shaped workpiece with a negative pressure. SOLUTION: The suction pad includes a disc member 4 having a vacuum suction hole 5. A plurality of protrusions 1, 2, and/or a protruding ring rise from one surface of the disc member 4. A ring 3 is formed to surround the protrusions 1, 2, and/or the protruding ring. COPYRIGHT: (C)2005,JPO&NCIPI
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