FLAT PANEL SUPPLY DEVICE AND FLAT PANEL TILTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a flat panel supplying device for carrying in/out a large-sized flat panel in its erected attitude without disturbing the air current of the peripheral part. SOLUTION: This flat panel supplying device is provided with a cassette part 3 for holding a plurality of flat panels FP in parallel in their erected attitudes and a device body part 20 having a carrying means 28 arranged on a carriage in/out line EOL for carrying in/out the flat panel FP, and brought into contact with the lower edge of the flat panel FP for carrying the flat panel FP to at least a cassette storage position, a plate-shaped member 27 arranged so as to be faced to the face of the flat panel FP at the cassette storage position, a gas film generating means for generating a gas film running downward between the flat panel FP and the plate-shaped member 27 and a moving mechanism 29 for moving the flat panel FP at the cassette storage position to the cassette part 3. COPYRIGHT: (C)2005,JPO&NCIPI