| 摘要 |
PROBLEM TO BE SOLVED: To provide a vertical cavity surface-emitting laser (VCSEL) having a mesa structure or post structure that can be protected from the outside. SOLUTION: The selectively oxidized type VCSEL having the post structure 20 contains a GaA<SB>S</SB>substrate 10 containing a lower multilayered semiconductor reflection film 12 on its surface, the post structure 20 formed on the substrate 10, and a plurality of projecting sections 30, 31, and 32 formed on the substrate 10 and separated from each other. The projecting sections 30, 31, and 32 have heights which are almost equal to that of the post structure 20. Preferably, the post structure 20 and the projecting sections 30, 31, and 32 contain the same semiconductor layers and upper surfaces of the structure 20 and sections 30, 31, and 32 substantially have the same heights. COPYRIGHT: (C)2005,JPO&NCIPI
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