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发明名称
VERFAHREN ZUR HERSTELLUNG PIEZOELEKTRISCHER AKTOREN
摘要
申请公布号
DE59910744(D1)
申请公布日期
2004.11.11
申请号
DE19995010744
申请日期
1999.07.29
申请人
ROBERT BOSCH GMBH
发明人
STIER, HUBERT;HOHL, GUENTHER;BOECKING, FRIEDRICH
分类号
H01L41/083;H01L41/24;(IPC1-7):H01L41/24
主分类号
H01L41/083
代理机构
代理人
主权项
地址
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