,申请号JP20020309466-传众专利搜索

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发明名称
摘要
申请公布号	JP3585902(B2)	申请公布日期	2004.11.10
申请号	JP20020309466	申请日期	2002.10.24
申请人		发明人
分类号	G01R1/073;G01R1/04;G01R31/00;G02F1/13;G02F1/1345;H01L21/66;(IPC1-7):G01R1/073	主分类号	G01R1/073
代理机构		代理人
主权项
地址

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