| 发明名称 |
Apparatus for coating a substrate. |
| 摘要 |
Device (1) for coating a substrate (2) including a vacuum chamber (5), at least one cathode arrangement (10) in the vacuum chamber, and a vacuum pump (11), with a suction space (14) between the vacuum pump and vacuum chamber, which is connected to the vacuum chamber via at least one pressure control valve (sic). |
| 申请公布号 |
EP1475458(A1) |
申请公布日期 |
2004.11.10 |
| 申请号 |
EP20040006860 |
申请日期 |
2004.03.22 |
| 申请人 |
INTERPANE ENTWICKLUNGS- UNDBERATUNGSGESELLSCHAFT MBH & CO. KG |
发明人 |
LANDGRAF, RALF;HERWIG, WILHELM |
| 分类号 |
H01J37/32;C23C14/56;H01J37/34;(IPC1-7):C23C14/56 |
主分类号 |
H01J37/32 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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