| 摘要 |
PROBLEM TO BE SOLVED: To enable maintaining the resonant state of a driven piezoelectric element, in a piezoelectric actuator in which a chip member arranged in an intersecting part of piezoelectric elements is driven for reciprocating motion, by arranging two piezoelectric elements rectangularly to each other, and driving one of the elements with an AC signal. SOLUTION: In this piezoelectric actuator, one piezoelectric element, e.g. a first piezoelectric element 10 is driven with an AC driving signal of a driving power source 16, and a chip member 20 generates reciprocating motion. A voltage proportional to a force which is applied to a second piezoelectric element 10' by the displacement of the first element 10 is detected by a detector 17. The frequency of the AC driving signal of the driving power source 16 is so adjusted that the maximum value of a signal voltage from the detector 17 becomes constant. |
