发明名称
摘要 Methods of forming capacitor-over-bit line memory cells are described. In one embodiment, a bit line contact opening is etched through conductive bit line material. In one implementation, a bit line contact opening is etched through a previously-formed bit line. In one implementation, a bit line contact opening is etched after forming a bit line.
申请公布号 KR100456358(B1) 申请公布日期 2004.11.10
申请号 KR20027000681 申请日期 2002.01.17
申请人 发明人
分类号 H01L21/768;H01L21/8242;H01L21/02;H01L27/108 主分类号 H01L21/768
代理机构 代理人
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