| 摘要 |
PURPOSE: A vaporizer is provided to restrain the precipitation and adhesion of a solid CVD(Chemical Vapor Deposition) material near an ejection port by using an ejection tube of double structure protruded toward a vaporization chamber. CONSTITUTION: A vaporizer includes a vaporization chamber(1) for vaporizing a CVD material, a CVD material supply part(2) for supplying the CVD material to the vaporization chamber, a vaporized gas exhaust port(3), a heating part(4) for heating the vaporization chamber, and an ejection tube(8) of double structure. The ejection tube includes an inner tube for ejecting the CVD material and an outer tube for ejecting carrier gas. The outer tube include a reducer-type end portion. The inner and outer tubes are protruded toward the vaporization chamber.
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