TEST PATTERN FOR EVALUATING PIXEL PROPERTIES OF CMOS IMAGE SENSOR CAPABLE OF MONITORING CONTACT RESISTANCE AND MODULE THEREOF

摘要

PURPOSE: A test pattern for evaluating pixel properties of a CMOS image sensor and a module thereof are provided to embody exactly process control by monitoring contact resistance in a pixel. CONSTITUTION: An active region(32) of a test pattern has the same structure to an active region of a pixel including a floating diffusion node, a power voltage node and an output node. A first, second and third contacts(34a,34b,34c) are formed at three edges of the active region. A first metal line(35) is connected to the active region via the contacts. A via is formed on the first metal line. A second metal line(36) is connected to the first metal line through the via. A test gate is embodied on the active region for measuring ON/OFF property of a transistor.