发明名称 Light-emitting device with reduced lattice mismatch
摘要 A light-emitting device with reduced lattice mismatch. The light-emitting device comprises a substrate having a first lattice constant, a first buffer multilayer deposited on the substrate, a second buffer multilayer deposited on the first buffer multilayer, and a GaN base epitaxial layer deposited on the second buffer multilayer. The lattice constant of the first buffer multilayer ranges from the first lattice constant at the bottom of the first buffer multilayer to a second lattice constant at the top of the first buffer multilayer. The lattice constant of the second buffer multilayer ranges from the second lattice constant at the bottom of the second buffer multilayer to a third lattice constant at the top of the second buffer multilayer.
申请公布号 US6815722(B2) 申请公布日期 2004.11.09
申请号 US20030601957 申请日期 2003.06.23
申请人 VETRA TECHNOLOGY, INC. 发明人 LAI MU-JEN;CHANG CHIUNG-YU
分类号 H01L21/20;H01L21/205;H01L33/00;(IPC1-7):H01L27/15 主分类号 H01L21/20
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