Method of determining a minimum pulse width for a short pulse laser system

摘要

A method is provided for determining a minimum pulse width for a pulsed laser beam in a short pulse laser system, such that the minimum pulse width accounts for dispersion associated with the pulse laser beam passing through a diffractive optical element. The method includes: determining size data for an ablation to be formed in a surface of a workpiece; determining an operating wavelength for a pulsed laser beam; determining spot size data for the beam incident on the workpiece; determining tolerance data for the spot size of the incident beam; and determining a minimum pulse width for the pulsed laser beam based on the size data for the ablation, the operating wavelength for the laser beam, the spot size data for the laser beam and the tolerance data for the spot size.