Vacuum treatment chamber and method for treating surfaces,申请号US20010821787-传众专利搜索

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发明名称	Vacuum treatment chamber and method for treating surfaces
摘要
申请公布号	US6814838(B2)	申请公布日期	2004.11.09
申请号	US20010821787	申请日期	2001.03.29
申请人	UNAXIS BALZERS AG	发明人	WEICHART JUERGEN
分类号	H05H1/46;B01J19/08;C23C14/34;C23F4/00;H01J37/32;H01L21/203;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):C23C14/34;C23C16/00	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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