发明名称 VIBRATION STABILIZATION DEVICE AND CONTROL METHOD THEREOF, WHICH ARE APPLIED FOR SUPER PRECISE POSITION CONTROL MECHANISM
摘要 PURPOSE: A vibration stabilization device and a control method thereof are provided to control vibration-stabilization without a specific design for vibration by confirming vibrations for a supporting unit and fixing an upper part of the stabilization device. CONSTITUTION: A vibration stabilization device is composed of an articulated unit for absorbing vibration of a supporting unit(1); a fixed mark position sensor mounted at the articulated unit to measure the position of a fixed mark(3); and an active control unit for controlling a measurement value output from the fixed mark position sensor as a target value. The articulated unit comprises a plurality of links(A1,A2,A3,An), a plurality of joints(B1,B2,B3,Bn) connecting the links, and a plurality of servo motors(C1,C2,C3,Cn) disposed to the joints. The fixed mark positioned out of the vibration stabilization device is one of natural markers as an artificial marker, stars, or structures.
申请公布号 KR20040093896(A) 申请公布日期 2004.11.09
申请号 KR20030027760 申请日期 2003.04.30
申请人 KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY 发明人 LEE, HO GIL
分类号 F16F15/02;(IPC1-7):F16F15/02 主分类号 F16F15/02
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