Method of characterizing a semiconductor surface,申请号US20010871287-传众专利搜索

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发明名称	Method of characterizing a semiconductor surface
摘要
申请公布号	US6816806(B2)	申请公布日期	2004.11.09
申请号	US20010871287	申请日期	2001.05.31
申请人	VEECO INSTR INC	发明人	KOCIMSKI STANISLAW M
分类号	B24B37/04;B24B49/00;G01Q30/04;(IPC1-7):G06F15/00	主分类号	B24B37/04
代理机构		代理人
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