发明名称 |
MEMS variable optical attenuator |
摘要 |
Disclosed is a MEMS (Micro Electro Mechanical System) variable optical attenuator. The MEMS variable optical attenuator comprises a substrate having a flat upper surface; an electrostatic attenuator disposed on the upper surface of the substrate; transmitting and receiving terminals disposed on the substrate so that optical axes of the terminals coincide with each other; and a beam shutter moved to a designated position between the transmitting and receiving terminals by the actuator, wherein the beam shutter is provided with a first coating layer made of a material with a reflectivity of more than 90% and formed on a surface of the beam shutter, and a second coating layer made of a material with a reflectivity of less than 80% so that a part of light is transmitted by the second coating layer and with a photodisintegration rate of the transmitted light determined by a thickness of the second coating layer.
|
申请公布号 |
US6816295(B2) |
申请公布日期 |
2004.11.09 |
申请号 |
US20030610543 |
申请日期 |
2003.07.02 |
申请人 |
SAMSUNG ELECTRO-MECHANICS CO., LTD. |
发明人 |
LEE JUNG HYUN;JUNG SUNG CHEON;HONG YOON SHIK;LEE HYUN KEE |
分类号 |
G02B6/00;B81B3/00;G02B6/26;G02B6/35;G02B26/02;G02B26/08;(IPC1-7):G02B26/02 |
主分类号 |
G02B6/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|