发明名称 |
Method of simultaneous display of die and wafer characterization in integrated circuit technology development |
摘要 |
A system for processing tester information is provided. Data is collected for a plurality of dies on a semiconductor wafer. Data and a pattern covering the semiconductor wafer are selected. Selected data are graphed in a trellis of graphs spread across the semiconductor wafer. The trellis of graphs is oriented over an outline of the semiconductor wafer.
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申请公布号 |
US6815233(B1) |
申请公布日期 |
2004.11.09 |
申请号 |
US20030460615 |
申请日期 |
2003.06.11 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
ERHARDT JEFFREY P.;SHETTY SHIVANANDA S. |
分类号 |
G01R31/311;H01L21/66;(IPC1-7):G01R31/26 |
主分类号 |
G01R31/311 |
代理机构 |
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地址 |
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