QUARTZ MOLD HEATER ASSEMBLY FOR CHEMICAL VAPOR DEPOSITION TO IMPROVE CORROSION RESISTANCE

摘要

PURPOSE: A quartz mold heater assembly for a CVD(Chemical Vapor Deposition) is provided to resist high temperature and to improve corrosion resistance by forming a susceptor using quartz. CONSTITUTION: A wafer contact part(26) is used for loading stably a semiconductor wafer. A quartz part is connected with a lower portion of the wafer contact part. A heat wire(30) is embedded in the quartz part. A cover(25) encloses completely the quartz part except the wafer contact part. The quartz part includes more than two disks. The two disks are connected with each other through a quartz welding portion(35).