| 摘要 |
PROBLEM TO BE SOLVED: To provide a finely moving actuator in which the angle of an object to be driven can be largely varied. SOLUTION: The actuator is composed of a movable part 1 which has a spiral cantilever structure and electrodes 2 and 3 provided on the side face of the inner peripheral part and the outer peripheral part of the movable part of the cantilever. The movable part 1 is fixed at the fixed end 4 to a substrate or the like. An electrostatic force acts on the whole face of the electrodes 2 and 3 when an electric voltage is applied between the electrodes 2 and 3, thus the angle of the front end part of the movable part 1 is made variable. COPYRIGHT: (C)2005,JPO&NCIPI
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