| 摘要 |
PROBLEM TO BE SOLVED: To provide a nitriding treatment apparatus and method which can efficiently perform nitriding treatment and can relatively rapidly form high-hardness hardened layers having excellent wear resistance etc., on members, parts, etc., made of steel at a low cost and an oxynitriding controller which can assure the safety of oxynitriding treatment in particular. SOLUTION: The nitriding treatment apparatus 1 comprises a charging table 2 on which works W are to be placed, a charging and cooling chamber 3 equipped with tables 31a and 31b on which works are to be placed and a nitriding treatment chamber 4 equipped with a table 41 on which works are to be placed, in which the tables of the charging and cooling chamber are so constituted as to permit placing of a plurality of the works thereon and to make the respective works placed thereon alternately transferable to the nitriding treatment chamber. Gaseous ammonia and air or oxygen are introduced through mass flow controllers 54 and 59, solenoid valves 56 and 60, and check valves 57 and 61, respectively electrically connected to a control section 69 into the nitriding treatment chamber. COPYRIGHT: (C)2005,JPO&NCIPI
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