发明名称 |
ACTUATOR |
摘要 |
<p>An actuator including a piezoelectric film. The film has a first side, a second side, and a thickness between the first side and the second side. The actuator also includes a first electrode adjacent to the first side of the film, and a second electrode adjacent to the second side of the film. The first electrode and the second electrode are configured to establish an electric field gradient across the thickness of the film when the first electrode and the second electrode are energized. The gradient causes deflection of the film. The gradient includes a difference between a field component substantially near the first side of the film and a field component substantially near the second side of the film.</p> |
申请公布号 |
WO2004095595(A1) |
申请公布日期 |
2004.11.04 |
申请号 |
WO2003US36467 |
申请日期 |
2003.11.13 |
申请人 |
BOARD OF CONTROL OF MICHIGAN TECHNOLOGICAL UNIVERSITY |
发明人 |
LEVY, MIGUEL;GHIMIRE, SHANKAR, R.;MOON, KEE, S. |
分类号 |
H01L41/047;H01L41/09;H02N2/02;(IPC1-7):H01L41/08 |
主分类号 |
H01L41/047 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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