| 摘要 |
PROBLEM TO BE SOLVED: To detect a suctioned state of a work to a suction pad in a short time. SOLUTION: An air exhausting port leading to a vacuum pump 32 via a vacuum drawing passage 27 is connected to a supplying and exhausting port where the suction pad 25 is connected, and also an air supplying port leading to a compressor 35 via a pressurizing passage 28 is connected. A passage switching valve 50 is provided which can make either the vacuum drawing passage 27 or the pressurizing passage 28 effective in order to switch the communication state of the air exhausting port and the air supplying port to the supplying and exhausting port. The flow rate of gas which flows through the passage of which either the vacuum drawing passage 27 or the pressurizing passage 28 is made effective is detected by a flow sensor 53. COPYRIGHT: (C)2005,JPO&NCIPI
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