Method to improve breakdown voltage by H2 plasma treat

摘要

A new method is provided for the improvement of breakdown performance of a layer of dielectric and the removal of a layer of copper oxide (CuO) from copper interconnects. The formed layer of dielectric, thereby including a formed layer of CuO or Cu2O is, using the invention, exposed to a H2 plasma treatment. The H2 plasma treatment reduces the dielectric constant of the exposed and surrounding layer of low-k dielectric while at the same time removing the layer of CuO.