发明名称 APPARATUS AND METHODS FOR THERMAL REDUCTION OF OPTICAL DISTORTION
摘要 Apparatus and methods for reducing optical distortion in an optical system by thermal means are disclosed. The apparatus includes a heating/cooling system spaced apart from and in thermal communication with an internally reflecting surface of a refractive element in the optical system. The heating/cooling system is adapted to create a select temperature distribution in the refractive optical element near the internally reflecting surface to alter the refractive index and/or the surface profile in a manner that reduces residual distortion.
申请公布号 WO2004095080(A2) 申请公布日期 2004.11.04
申请号 WO2004US11778 申请日期 2004.04.16
申请人 ULTRATECH, INC. 发明人 MARKLE. DAVID, A.
分类号 G02B7/18;G03F7/20 主分类号 G02B7/18
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