| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck that can be used adequately in a temperature range of 200°C set at the time of manufacturing a semiconductor, and its feeding terminal can be reutilized from the viewpoint of recently promoted resource conservation. SOLUTION: The electrostatic chuck is provided with a substrate 30, dielectric layers 31 and 34 which are melt-sprayed to the top surface of the substrate 30 and in which an internal electrode 33 is embedded, and the feeding terminal 38 which is extended to the internal electrode 33 from the bottom side of the substrate 30 and provided with an electrode 37. In the chuck, the feeding terminal 38 and substrate 30 are fixed by mechanical fastening. COPYRIGHT: (C)2005,JPO&NCIPI |
