| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an insulating film-forming material which comprises a component capable of constituting a polybenzazole compound having a high crosslinking degree and, in particular, can easily realize a film thickness necessary for use as an interlayer insulating film, and an insulating film formed from the material. <P>SOLUTION: The insulating film-forming material comprises a polymerizable composition obtained by dissolving an adamantane polycarboxylic acid derivative represented by formula (1) (wherein X is a hydrogen atom, a hydrocarbon group or R<SP>4</SP>; R<SP>1</SP>-R<SP>4</SP>are the same or different and are each a carboxyl group or the like optionally protected with a protecting group; and Y<SP>1</SP>-Y<SP>4</SP>are the same or different and are each a single bond or a divalent aromatic cyclic group) and an aromatic polyamine derivative represented by formula (2) (wherein the ring Z is a monocyclic or polycyclic aromatic ring; and R<SP>5</SP>-R<SP>8</SP>are each a substituent group bonded to the ring Z and are, same or different, an amino group or the like optionally protected with a protecting group) in an organic solvent. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
