发明名称 |
SORTING EQUIPMENT FOR MICRO METAL BALL |
摘要 |
PROBLEM TO BE SOLVED: To provide a sorting method for micro metal balls which has a simple constitution and sorts products of good quality with high accuracy. SOLUTION: This shape-sorting equipment for metal balls of diameters 50 to 150μm is formed with a tilted face 5 having contacted faces of sorted balls and a straight-advancing feeder apparatus 4 to give oscillations to ball driving when the balls are rolled over to the tilted face. Each ball is sorted according to a travelling fall position of each ball by controlling the travelling direction 3 of the oscillations of the straight-advancing feeder apparatus 4 and a tilted angle to the ground face in the traveling direction and in the vertical direction inside in areas of predetermined angles 2a and 2b set under a proper oscillation region. The metal balls having high accuracy which do not include abnormal shape products capable of being provided for an actual use for an inner bump in a package are thereby sorted. COPYRIGHT: (C)2005,JPO&NCIPI
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申请公布号 |
JP2004312040(A) |
申请公布日期 |
2004.11.04 |
申请号 |
JP20040200573 |
申请日期 |
2004.07.07 |
申请人 |
ALLIED MATERIAL CORP |
发明人 |
HASEGAWA NORIHIKO;ICHIDA AKIRA |
分类号 |
G01B5/08;H01L21/60;(IPC1-7):H01L21/60 |
主分类号 |
G01B5/08 |
代理机构 |
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