| 摘要 |
PROBLEM TO BE SOLVED: To realize rapid operation of a ferroelectric capacitor in a ferroelectric memory. SOLUTION: In a ferroelectric capacitor 130, a polarizable nuclear generation electrode 132 is provided on a lower electrode layer 131. Thereby, inversion polarizable nuclear in a ferroelectric layer 133 is easily generated on the polarizable nuclear generation electrode 132. Therefore, a number of inversion polarizable nuclears can be generated by setting an arrangement interval of the polarizable nuclear generation electrode 132 properly. When a number of inversion polarizable nuclears are generated, the time required for growth of the inversion polarizable nuclear in a transverse direction can be shortened, thus reducing the time required for saturation of inversion polarization of the ferroelectric capacitor 130. COPYRIGHT: (C)2005,JPO&NCIPI
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