METHOD AND APPARATUS FOR DUMMY WIRING FORMING

摘要

PROBLEM TO BE SOLVED: To provide a dummy wiring forming method capable of effectively and efficiently forming dummy wiring. SOLUTION: A plurality of dummy patterns 41 are arranged so as to form a grid shape in a dummy generating region 36 estimated in a layout region 31. Of the dummy patterns 41 included in the region 36, the dummy patterns 41 with no omission of figures are coupled with one another to form a dummy wiring pattern 42 having a predetermined wiring width. COPYRIGHT: (C)2005,JPO&NCIPI