Sensor device having a magnetostrictive force sensor

摘要

A sensor device having a magnetostrictive force sensor is provided. To detect a force, the sensor device contains a TMR force sensor element having a magnetic detection layer of material having a magnetostriction coefficient lambda>=|5.10<-6>|, a magnetically harder reference layer, and a tunnel barrier disposed between these layers. Established in the detection layer is a starting magnetization that relative to the magnetization of the reference layer, which is directed in the direction of force, forms an angle of other than 0° and thus is rotated out of its starting position under the effect of the force.