Thin film shape memory alloy (SMA) micro pump that has high work density and high frequency response. A miniature SMA pump is used to rectify liquid to achieve stroke. Controlled fluid flow provides forced convection cooling on the SMA membrane that allows the micro pump to operate at high operational frequencies and high work density.
申请公布号
WO2004094821(A2)
申请公布日期
2004.11.04
申请号
WO2004US11955
申请日期
2004.04.15
申请人
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA;CARMAN, GREGORY, P.;SHIN, DANIEL, D.