发明名称 |
A MICRO-ELECTRO-MECHANICAL-SYSTEM TWO DIMENSIONAL MIRROR WITH ARTICULATED SUSPENSION STRUCTURES FOR HIGH FILL FACTOR ARRAYS |
摘要 |
<p>The invention provides a micro-electro-mechanical-system (MEMS) mirror device, comprising: a mirror having a 2-dimensional rotational articulated hinge at a first end, and having a 1-dimensional rotational articulated hinge at a second end opposite the first end; a movable cantilever connected to the mirror through the 1-dimensional rotational articulated hinge; a support structure connected to the mirror through the 2-dimensional rotational articulated hinge and connected to the movable cantilever; whereby movement of said movable cantilever causes rotation of the mirror in a first axis of rotation, and the mirror is also rotatable about a second torsional axis of rotation perpendicular to said first axis of rotation.</p> |
申请公布号 |
WO2004094301(A1) |
申请公布日期 |
2004.11.04 |
申请号 |
WO2004CA00598 |
申请日期 |
2004.04.20 |
申请人 |
METCONNEX CANADA INC.;MALA, MOHIUDDIN;DUCELLIER, THOMAS;HNATIW, ALAN;PEALE, DAVID |
发明人 |
MALA, MOHIUDDIN;DUCELLIER, THOMAS;HNATIW, ALAN;PEALE, DAVID |
分类号 |
B81B3/00;G02B6/35;G02B26/08;(IPC1-7):B81B3/00;H04J14/02 |
主分类号 |
B81B3/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|