| 摘要 |
PROBLEM TO BE SOLVED: To provide a container for semiconductor wafers whereby, when storing semiconductor wafers in the container, it can be prevented from being damaged by its contact with the partition plate of the container. SOLUTION: In the container, a portion of the opened-end side of each partition plate 12 comprises a guide 18, and the partition plates 12 are so tapered that their dimensions in the arrangement direction of them are reduced when proceeding in one of the insertion/exhaustion directions of the container. Consequently, when storing each semiconductor 13 in the container for semiconductor wafers, its movement is so undisturbed as to guide it smoothly to its disposal region 15, even though both sides 21 of the wafer 13 in its widthwise direction are contacted with the guides 18. COPYRIGHT: (C)2005,JPO&NCIPI |
