| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for improving a semiconductor aligner optical part in transmittance. SOLUTION: In the optical device dehydrating method, an optical element is introduced into a processing chamber and irradiated with ultraviolet rays having wavelength of 180 nm or below, in an atmosphere of gas having a moisture content of 3 ppm or below to remove moisture and hydroxyl groups attached on the surface of the optical device. COPYRIGHT: (C)2005,JPO&NCIPI |
