| 摘要 |
PROBLEM TO BE SOLVED: To improve the operation rate of an applicator and to reduce a maintenance/control man-hour when work for washing an exhaust duct is included. SOLUTION: A solvent nozzle 201 (202) for cleaning mist, a mist trap 401 (402), and a duct drain case 300 are fitted to the branching end 101 (102) of a branching duct 100 to which an exhaust conduit 73-1 (73-2) for exhausting the inside of a cup 70 housing a spin chuck 71 holding a wafer W approximately horizontally is connected. At an optional opportunity corresponding to an operation situation etc., duct cleaning treatment in which a solvent 200 is sprayed from the nozzle 201 (202) into the branching duct 100 to dissolve/remove the mist adherent to the duct 1, and the mist is recovered in the duct drain case 300 is done automatically. COPYRIGHT: (C)2005,JPO&NCIPI
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